Section 16 Machinery and mechanical appliances; electrical equipment; parts thereof; sound recorders and reproducers, television image and sound recorders and reproducers and parts and accessories of such articles 84 Nuclear reactors, boilers, machinery and mechanical appliances; parts thereof 84 86 Machines and apparatus of a kind used solely or principally for the ma nufacture of semiconductor boules or wafers, semiconductor devices, el ectronic integrated circuits or flat panel displays; machines and appa ratus specified in Note 9(C) to this Chapter; parts and accessories. Commodity Code Description 84 86 10 Apparatus for rapid heating of semiconductor wafers 84 86 20 Chemical vapour deposition apparatus for semiconductor production 84 86 30 Apparatus for dry etching patterns on flat panel display substrates 84 86 40 Focused ion beam milling machines to produce or repair masks and reticles for pattern 84 86 90 Of apparatus for rapid heating of semiconductor wafers
